A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: Electromechanical model and parameter extraction

J. Teva, G. Abadal, F. Torres, J. Verd, F. Pérez-Murano, N. Barniol

Research output: Contribution to journalArticleResearchpeer-review

20 Citations (Scopus)

Abstract

A microcantilever based platform for mass detection in the femtogram range has been integrated in the doped top silicon layer of a SOI substrate. The on-plane fundamental resonance mode of the cantilever is excited electrostatically and detected capacitively by means of two parallel placed electrodes in a two port configuration. An electromechanical model of the cantilever-electrodes transducer and its implementation in a SPICE environment are presented. The model takes into account non-linearities from variable cantilever-electrode gap, fringing field contributions and real deflection shape of the cantilever for the calculation of the driving electrostatic force. A fitting of the model to the measured S21 transmitted power frequency response is performed to extract the characteristic sensor parameters as Young modulus, Q factor, electrical parasitics and mass responsivity. © 2006 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)800-807
JournalUltramicroscopy
Volume106
DOIs
Publication statusPublished - 1 Jun 2006

Keywords

  • Cantilever based sensors
  • Electromechanical model
  • NEMS
  • Resonance frequency

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