A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: Sensor calibration and glycerine evaporation rate measurement

J. Teva, G. Abadal, F. Torres, J. Verd, F. Pérez-Murano, N. Barniol

Research output: Contribution to journalArticleResearchpeer-review

29 Citations (Scopus)

Abstract

This paper presents mass measurements of glycerine beads performed by means of laterally resonant micro-cantilevers. The transducer architecture is based on a resonant cantilever electrostatically coupled by two parallel placed electrodes. Previous to glycerine measurements, a calibration of the mass sensor has been performed by measuring a standard mass based on latex spheres. From these measurements, a value of the mass responsivity is deduced. In addition, a study of the transducer phase noise has been carried out in order to determine the minimum detectable mass. Mass measurements experiments have been performed by detecting the change on the resonance frequency of the on-plane cantilever resonant mode, produced by locally deposited mass. Additionally, the mass losses detected on the calibrated transducer after glycerine drop deposition allowed determining its evaporation rate. © 2006 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)808-814
JournalUltramicroscopy
Volume106
DOIs
Publication statusPublished - 1 Jun 2006

Keywords

  • Cantilever based sensors
  • Evaporation rate
  • MEMS
  • Mass sensor

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