A CMOS-MEMS filter using a V-coupler and electrical phase inversion

J. Giner*, A. Uranga, F. Torres, E. Marigo, J. L.Muñoz Gamarra, N. Barniol

*Corresponding author for this work

Research output: Contribution to journalArticleResearchpeer-review

6 Citations (Scopus)


In this paper a fully integrated CMOS-MEMS filter is presented. The filter is formed by two beams using a V-shaped coupler which allows the in-plane vibrations. The device presents a BW of 1.85MHz for a 29MHz center frequency. The electrical phase inversion mechanism is used in order to obtain the filter response. The device is fabricated using the capacitance module present in the commercial CMOS technology from Austria Micro-systems 0.35 μm.

Original languageEnglish
Pages (from-to)344-348
Number of pages5
Journal2010 IEEE International Frequency Control Symposium, FCS 2010
Publication statusPublished - 2010


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