A CMOS-MEMS filter using a V-coupler and electrical phase inversion

J. Giner; A. Uranga; F. Torres; E. Marigo; J. L.Muñoz Gamarra; N. Barniol

doi:10.1109/FREQ.2010.5556313

A CMOS-MEMS filter using a V-coupler and electrical phase inversion

J. Giner^*, A. Uranga, F. Torres, E. Marigo, J. L.Muñoz Gamarra, N. Barniol

^*Corresponding author for this work

Universitat Autònoma de Barcelona (UAB)

Research output: Contribution to journal › Article › Research › peer-review

6 Citations (Scopus)

Abstract

In this paper a fully integrated CMOS-MEMS filter is presented. The filter is formed by two beams using a V-shaped coupler which allows the in-plane vibrations. The device presents a BW of 1.85MHz for a 29MHz center frequency. The electrical phase inversion mechanism is used in order to obtain the filter response. The device is fabricated using the capacitance module present in the commercial CMOS technology from Austria Micro-systems 0.35 μm.

Original language	English
Pages (from-to)	344-348
Number of pages	5
Journal	2010 IEEE International Frequency Control Symposium, FCS 2010
DOIs	https://doi.org/10.1109/FREQ.2010.5556313
Publication status	Published - 2010

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@article{d745a6cd63bb4eccaf8878f2db7b16fe,

title = "A CMOS-MEMS filter using a V-coupler and electrical phase inversion",

abstract = "In this paper a fully integrated CMOS-MEMS filter is presented. The filter is formed by two beams using a V-shaped coupler which allows the in-plane vibrations. The device presents a BW of 1.85MHz for a 29MHz center frequency. The electrical phase inversion mechanism is used in order to obtain the filter response. The device is fabricated using the capacitance module present in the commercial CMOS technology from Austria Micro-systems 0.35 μm.",

author = "J. Giner and A. Uranga and F. Torres and E. Marigo and Gamarra, {J. L.Mu{\~n}oz} and N. Barniol",

year = "2010",

doi = "10.1109/FREQ.2010.5556313",

language = "English",

pages = "344--348",

}

TY - JOUR

T1 - A CMOS-MEMS filter using a V-coupler and electrical phase inversion

AU - Giner, J.

AU - Uranga, A.

AU - Torres, F.

AU - Marigo, E.

AU - Gamarra, J. L.Muñoz

AU - Barniol, N.

PY - 2010

Y1 - 2010

N2 - In this paper a fully integrated CMOS-MEMS filter is presented. The filter is formed by two beams using a V-shaped coupler which allows the in-plane vibrations. The device presents a BW of 1.85MHz for a 29MHz center frequency. The electrical phase inversion mechanism is used in order to obtain the filter response. The device is fabricated using the capacitance module present in the commercial CMOS technology from Austria Micro-systems 0.35 μm.

AB - In this paper a fully integrated CMOS-MEMS filter is presented. The filter is formed by two beams using a V-shaped coupler which allows the in-plane vibrations. The device presents a BW of 1.85MHz for a 29MHz center frequency. The electrical phase inversion mechanism is used in order to obtain the filter response. The device is fabricated using the capacitance module present in the commercial CMOS technology from Austria Micro-systems 0.35 μm.

UR - http://www.scopus.com/inward/record.url?scp=77957865926&partnerID=8YFLogxK

U2 - 10.1109/FREQ.2010.5556313

DO - 10.1109/FREQ.2010.5556313

M3 - Article

AN - SCOPUS:77957865926

SP - 344

EP - 348

ER -

A CMOS-MEMS filter using a V-coupler and electrical phase inversion

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