Original language | English |
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Pages (from-to) | 458-462 |
Journal | Microelectronic Engineering |
Volume | 98 |
DOIs | |
Publication status | Published - 1 Jan 2012 |
A 230 MHz CMOS-MEMS bulk acoustic wave resonator
E. Marigó, J.L. Muñoz-Gamarra, J. Giner, A. Uranga, N. Barniol
Research output: Contribution to journal › Article › Research
4
Citations
(Scopus)