A 230 MHz CMOS-MEMS bulk acoustic wave resonator

E. Marigó, J.L. Muñoz-Gamarra, J. Giner, A. Uranga, N. Barniol

Research output: Contribution to journalArticleResearch

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)458-462
JournalMicroelectronic Engineering
Volume98
DOIs
Publication statusPublished - 1 Jan 2012

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