193rd ECS Meeting Abstracts: "Atomic Transport Phenomena Near the Polysilicon/SiO2 Interface on Silicon During the Phosphorous Diffusion: 193rd Meeting of the Electrochemical Society

F. Gaiseanu, D. Tsoukalas, J. Stoemenos, C.A. Dimitriadis, C.A. Londos, J. Esteve, C. Postolache

    Research output: Book/ReportProceedingResearch

    Original languageEnglish
    Place of PublicationCalifornia (US)
    Number of pages1
    Publication statusPublished - May 1998

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