Optimització de la tècnica d'oxidació mitjançant microscòpia de sonda local per a la fabricació de dispositius electrònics nanomètrics

Scanned probe microscope (SPM) oxidation is a promising technique for nanoelectronic device fabrication. Under this proposal, the Principal Investigators (PIs), FPM and JAD, will optimize SPM-based silicon nanodevice fabrication process and instrumentation capabilities by integrating noncontact (FPM) and voltage modulation (JAD) enhancements which each has been responsible for developing recently through his own ongoing research program. The PIs, already recognizing the potential benefits to be gained by the combination of these techniques in terms of both scientific understanding and device engineering practice, have been engaged in informal discussion and collaboration since 1997.