NANOMASS Nanoresonators with integrated circuitry for high sensitivity and high spatial resolution mass detection

Keyphrases

1. High Sensitivity 100%
2. High Spatial Resolution 100%
3. Mass Detection 100%
4. Nanoresonator 100%
5. Circuitry 100%
6. Nanotechnology 33%
7. CMOS Circuits 16%
8. Nanometer Scale 16%
9. Microsystems 16%
10. Integrated Circuits 16%
11. Nanomechanical Sensor 16%
12. Atomic Force Microscopy Lithography 16%
13. Circuit Integration 16%
14. Laser Lithography 16%
15. Electrical Measurements 16%
16. Microelectronic Technology 16%
17. Ultra-high Resolution 16%
18. CMOS Technology 16%
19. Scale Dimension 16%
20. High Performance 16%