The aim of the project is to compatibilise well-known CMOS microelectronic technology with novel nanotechnology for the development of new types of high performance nanomechanical sensors. The project is based on a recently developed nanoresonator for mass detection. The sensor is fabricated using novel nanotechnologies, that is, Atomic Force Microscopy (AFM) and laser lithography on metals with resolutions in the nm range. The nanometer-scale dimensions of the nanoresonator will allow extremely high sensitivity and extremely high resolution. CMOS circuit integration will facilitate electrical measurements and it will allow future integration of multiple nanoresonators. The work will focus on: (a) optimising the nanoresonator characteristics and (b) fabricating a microsystem consisting of the nanoresonator and an integrated circuit, using a CMOS compatible process.
|Effective start/end date||1/05/00 → 30/04/01|
- Mikroelektronik Centret (DTU)
- The Spanish National Research Council (CSIC)
- Universitat Autònoma de Barcelona (UAB) (lead)
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