Integración de tecnologia microelectrónica y procesos de nanofabricación para el desarrollo de sensores de masa/biosensores

The aim of the project is the development for a resonant mass sensor of very hight sensitivity, which will be fabricated with the combination of microtechnological processes (CMOS compatible) with nanotechnological processes. The sensing element will be a silicon cantilever with submicrometer dimensions. At the end of the project, it is expected to applications, in the framework of the present project, we will focus on biochemical applications, and specifically, on the detection of biomolecules (biosensor).. The use of nanofabrication processes is the main innovation of the project, and it allows to increase the sensor sensitivity in front of any other commercial device. The combination of nanofabricaton and standard microelectronic processes will allow to monolithically integrate the sensor and a microelectronic circuit, which will allow to exploit the sensor performance. As a final result of the project, we expect to fabricate a resonator sensor array, based on nanocantilevers for multiple detection of biomolecules. The fabrication of the sensor will be realized through the collaboration of three groups: The group of the CNM group will be responsible of the technological process for the fabrication. The final nanofabrication process will be permormed at the Mikroelektronik Centeret in Denmark, through an on-going collaboration of these groups in the framework of the European Project NANOMASS. Finally, the aplicability of the sensor will be tested in the detection of biomolecules. For this task, the group of the UB will be in change of the design and realization of the sensor funcionalization.