This project is inted to develop a local electromagnetic field analysis system for passive optical components integrated on silicon. The system is based on a scanning tunneling microscope. Firstly, the design and construction of a PSTM will be performed, together with the fabrication of waveguides with ARROW structures, using silicon technology. The waveguides will be optically characterized and the evanescent field behaviour studied as a function of the technological process parameters. In the next step, results will help to improve the design and fabrication of passive components, and their optical characterization will be correlated with the PSTM analysis.
|Effective start/end date||1/07/95 → 1/07/98|