In this project, a Scanning Near Field Optical Microscope (SNOM) will be designed and fabricated in order to characterize integrated waveguides and optical devices. These devices (based on ARROW structures) are fabricated using silicon technology at the Centro Nacional de Microelectrónica. The present project represents the continuation of a previous project ("Diseño y realización de un sistema PSTM para el análisis de componentes ópticos pasivos integrados con tecnología de silicio"; TIC95-0919-CO2), in which we have demonstrated the feasibility of using an evanescent field microscope (PSTM) for characterizing these structures. The conversion PSTM to SNOM with feedback control based on shear force detection using a tuning fork will allow to obtain simultaneously topographical and optical sensors. The intrinsic advantages of SNOM will allow to "in situ" characterize the sensors, i.e., for example inside liquid. Finally, within this project, NANOFAB) and as characterization tool for other research groups (for example, other integrated optoelectronic devices or in Biology).
|Effective start/end date||1/12/98 → 30/11/99|
- Comisión Interministerial de Ciencia y Tecnología (CICYT): €17,429.35