Research output per year
Research output per year
- 1 - 50 out of 75 results
Search results
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2024
A Single-chip AlScN PMUTs-on-CMOS hydrophone
Ledesma, E., Uranga del Monte, A. & Barniol i Beumala, N., 1 Jul 2024, In: IEEE Sensors Journal. 24, 13, p. 21311-21320 10 p.Research output: Contribution to journal › Article › Research › peer-review
Open Access -
Fully Integrated Pitch-Matched AlScN PMUT-on-CMOS Array for High- Resolution Ultrasound Images
Ledesma, E., Uranga del Monte, A., Torres, F. & Barniol i Beumala, N., 15 May 2024, In: IEEE Sensors Journal. 24, 10, p. 15954-15966 13 p.Research output: Contribution to journal › Article › Research › peer-review
Open Access1 Citation (Scopus) -
2023
Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection
Torres, F., Uranga del Monte, A. & Barniol i Beumala, N., 3 Nov 2023, In: Sensors. 23, 21Research output: Contribution to journal › Article › Research › peer-review
Open Access -
2022
Fluid compressional properties sensing at microscale using a longitudinal bulk acoustic wave transducer operated in a pulse-echo scheme
Yanez, J., Uranga, A. & Barniol, N., 1 Feb 2022, In: Sensors and Actuators A: Physical. 334, 11 p., 113334.Research output: Contribution to journal › Article › Research › peer-review
Open Access5 Citations (Scopus) -
Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS
Zamora, I., Ledesma, E., Uranga, A. & Barniol, N., 1 Jul 2022, In: IEEE Electron Device Letters. 43, 7, p. 1113-1116 4 p.Research output: Contribution to journal › Article › Research › peer-review
12 Citations (Scopus) -
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
Ledesma, E., Zamora, I., Yanez, J., Uranga, A. & Barniol, N., 5 Jul 2022, In: Microsystems and Nanoengineering. 8, 1, 9 p., 76.Research output: Contribution to journal › Article › Research › peer-review
Open Access15 Citations (Scopus) -
2021
Enhancing aln pmuts’ acoustic responsivity within a mems-on-cmos process
Ledesma, E., Zamora, I., Uranga, A., Torres, F. & Barniol, N., 1 Dec 2021, In: Sensors. 21, 24, 8447.Research output: Contribution to journal › Article › Research › peer-review
Open Access11 Citations (Scopus) -
High accuracy ultrasound micro-distance measurements with pmuts under liquid operation
Zamora, I., Ledesma, E., Uranga, A. & Barniol, N., 1 Jul 2021, In: Sensors. 21, 13, 11 p., 13.Research output: Contribution to journal › Article › Research › peer-review
Open Access4 Citations (Scopus) -
Multielement ring array based on minute size pmuts for high acoustic pressure and tunable focus depth
Ledesma, E., Zamora, I., Uranga, A. & Barniol, N., 13 Jul 2021, In: Sensors. 21, 14, 18 p., 14.Research output: Contribution to journal › Article › Research › peer-review
Open Access5 Citations (Scopus) -
2020
Miniaturized 0.13-µm CMOS front-end analog for AlN PMUT arrays
Zamora, I., Ledesma, E., Uranga, A. & Barniol, N., 2 Feb 2020, In: Sensors. 20, 4, 1205.Research output: Contribution to journal › Article › Research › peer-review
Open Access31 Citations (Scopus) -
Monolithic Single PMUT-on-CMOS Ultrasound System with +17 dB SNR for Imaging Applications
Zamora, I., Ledesma, E., Uranga, A. & Barniol, N., 2020, In: IEEE Access. 8, p. 142785-142794 10 p., 9154376.Research output: Contribution to journal › Article › Research › peer-review
Open Access33 Citations (Scopus) -
Tent-Plate AlN PMUT with a Piston-Like Shape under Liquid Operation
Ledesma, E., Zamora, I., Uranga, A. & Barniol, N., 1 Oct 2020, In: IEEE Sensors Journal. 20, 19, p. 11128-11137 10 p., 9096364.Research output: Contribution to journal › Article › Research › peer-review
25 Citations (Scopus) -
2018
Fabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay
Riverola, M., Uranga, A., Torres, F. & Barniol, N., 15 May 2018, In: Microelectronic Engineering. 192, p. 44-51 8 p.Research output: Contribution to journal › Article › Research › peer-review
10 Citations (Scopus) -
High performance seesaw torsional CMOS-MEMS relay using tungsten VIA layer
Riverola, M., Uranga, A. & Barniol, N., 7 Nov 2018, In: Micromachines. 9, 579.Research output: Contribution to journal › Article › Research
3 Citations (Scopus) -
Squared PMUT with Enhanced Pressure Sensitivities
Ledesma, E., Zamora, I., Torres, F., Uranga, A., Tzanov, V., Barniol, N., Marigó, E. & Soundara-Pandian, M., 1 Jan 2018, In: Proceedings. 9, p. 925-930Research output: Contribution to journal › Article › Research
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2017
Optimization of the close-to-carrier Phase Noise in a CMOS-MEMS oscillator using a Phase Tunable Sustaining-Amplifier
Sobreviela, G., Riverola, M., Torres, F., Uranga, A. & Barniol, N., 1 May 2017, In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 64, 5, p. 888-897 7851036.Research output: Contribution to journal › Article › Research › peer-review
8 Citations (Scopus) -
Phase-Noise Reduction in a CMOS-MEMS Oscillator under Nonlinear MEMS Operation
Uranga, A., Sobreviela, G., Riverola, M., Torres, F. & Barniol, N., 1 Dec 2017, In: IEEE Transactions on Circuits and Systems I: Regular Papers. 64, 12, p. 3047-3055 9 p., 8077754.Research output: Contribution to journal › Article › Research › peer-review
9 Citations (Scopus) -
Single-resonator dual-frequency BEOL-embedded CMOS-MEMS oscillator with low-power and ultra-compact TIA core
Riverola, M., Sobreviela, G., Torres, F., Uranga, A. & Barniol, N., 1 Feb 2017, In: IEEE Electron Device Letters. 38, 2, p. 273-276 7797162.Research output: Contribution to journal › Article › Research › peer-review
23 Citations (Scopus) -
Suppression of the A-f-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles
Sobreviela, G., Vidal-Álvarez, G., Riverola, M., Uranga, A., Torres, F. & Barniol, N., 1 Apr 2017, In: Sensors and Actuators, A: Physical. 256, p. 59-65Research output: Contribution to journal › Article › Research › peer-review
18 Citations (Scopus) -
2016
A monolithically integrated torsional CMOS-MEMS relay
Riverola, M., Sobreviela, G., Torres, F., Uranga, A. & Barniol, N., 2016, In: Journal of Micromechanics and Microengineering.Research output: Contribution to journal › Article › Research › peer-review
10 Citations (Web of Science) -
A Monollithically Integrated Torsional CMOS-MEMS Relay
Riverola, M., Sobreviela, G., Torres, F., Uranga, A. & Barniol, N., 1 Jan 2016, In: Journal of Micromechanics and Microengineering. 26, p. 1150122-Research output: Contribution to journal › Article › Research
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CMOS-NEMS copper switches monolithically integrated using a 65 nm CMOS technology
Muñoz-Gamarra, J. L., Uranga, A. & Barniol, N., 1 Jan 2016, In: Micromachines. 7, 2, 30.Research output: Contribution to journal › Article › Research › peer-review
14 Citations (Scopus) -
Dynamic Properties of Three-Terminal Tungsten CMOS-NEM Relays Under Nonlinear Tapping Mode
Riverola, M., Vidal-Álvarez, G., Sobreviela, G., Uranga, A., Torres, F. & Barniol, N., 1 Jul 2016, In: IEEE Sensors Journal. 16, 13, p. 5283-5291 7463470.Research output: Contribution to journal › Article › Research › peer-review
17 Citations (Scopus) -
Enhancement of frequency stability using synchronization of a cantilever array for MEMS-based sensors
Torres, F., Uranga, A., Riverola, M., Sobreviela, G. & Barniol, N., 13 Oct 2016, In: Sensors. 16, 10, 1690.Research output: Contribution to journal › Article › Research › peer-review
10 Citations (Scopus) -
2015
Top-down CMOS-NEMS polysilicon nanowire with piezoresistive transduction
Marigó, E., Sansa, M., Pérez-Murano, F., Uranga, A. & Barniol, N., 14 Jul 2015, In: Sensors. 15, 7, p. 17036-17047 12 p.Research output: Contribution to journal › Article › Research › peer-review
2 Citations (Scopus) -
2014
CMOS-MEMS switches based on back-end metal layers
Muñoz-Gamarra, J. L., Vidal-Álvarez, G., Torres, F., Uranga, A. & Barniol, N., 1 May 2014, In: Microelectronic Engineering. 119, p. 127-130Research output: Contribution to journal › Article › Research › peer-review
12 Citations (Scopus) -
Nanomechanical switches based on metal-insulator-metal capacitors from a standard complementary-metal-oxide semiconductor technology
Muñoz-Gamarra, J. L., Uranga, A. & Barniol, N., 16 Jun 2014, In: Applied physics letters. 104, 24, 243105.Research output: Contribution to journal › Article › Research › peer-review
15 Citations (Scopus) -
2013
Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories
Uranga, A., Verd, J., Marigó, E., Giner, J., Muñóz-Gamarra, J. L. & Barniol, N., 14 May 2013, In: Sensors and Actuators, A: Physical. 197, p. 88-95Research output: Contribution to journal › Article › Research › peer-review
59 Citations (Scopus) -
Integration of NEMS resonators in a 65 nm CMOS technology
Gamarra, J. L. M., Alcaide, P., Marigó, E., Giner, J., Uranga, A., Esteve, J. & Barniol, N., 1 Jan 2013, In: Microelectronic Enginering. 110, p. 246-249Research output: Contribution to journal › Article › Research › peer-review
29 Citations (Scopus) -
Packaged CMOS-MEMS free-free beam oscillator
Marigó, E., Verd, J., López, J. L., Uranga, A. & Barniol, N., 1 Nov 2013, In: Journal of Micromechanics and Microengineering. 23, 11, 115018.Research output: Contribution to journal › Article › Research › peer-review
11 Citations (Scopus) -
2012
A 230 MHz CMOS-MEMS bulk acoustic wave resonator
Marigó, E., Muñoz-Gamarra, J. L., Giner, J., Uranga, A. & Barniol, N., 1 Jan 2012, In: Microelectronic Engineering. 98, p. 458-462Research output: Contribution to journal › Article › Research
4 Citations (Scopus) -
A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators
Giner, J., Uranga, A., Muñóz-Gamarra, J. L., Marigó, E. & Barniol, N., 1 May 2012, In: Journal of Micromechanics and Microengineering. 22, 5, 055020.Research output: Contribution to journal › Article › Research › peer-review
15 Citations (Scopus) -
Cancellation of the Parasitic Feedthrough Current in an Integrated CMOS-MEMS Clamped- Clamped Beam Resonator
J. Giner, A. U. & Barniol, N., 1 Jan 2012, In: Microelectronic Engineering. 98, p. 599-602Research output: Contribution to journal › Article › Research
7 Citations (Scopus) -
VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator
Giner, J., Uranga, A., Muñoz-Gamarra, J. L., Marigó, E. & Barniol, N., 26 Apr 2012, In: Electronics Letters. 48, 9, p. 514-516 3 p.Research output: Contribution to journal › Article › Research › peer-review
3 Citations (Scopus) -
2011
Cross Coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection
Marigó, E., Muñoz-Gamarra, J. L., Vidal, G., Giner, J., Torres, F., Uranga, A. & Barniol, N., 1 Jan 2011, In: Microelectronic Engineering. 88, 8, p. 2325- 2329Research output: Contribution to journal › Article › Research
5 Citations (Scopus) -
2010
A CMOS-MEMS filter using a V-coupler and electrical phase inversion
Giner, J., Uranga, A., Torres, F., Marigo, E., Gamarra, J. L. M. & Barniol, N., 2010, In: 2010 IEEE International Frequency Control Symposium, FCS 2010. p. 344-348 5 p.Research output: Contribution to journal › Article › Research › peer-review
6 Citations (Scopus) -
CHARACTERIZATION OF CMOS-MEMS RESONATOR BY PULSED MODE ELECTROSTATIC ACTUATION
Munoz-Gamarra, J. L., Marigo, E., Giner, J., Uranga, A., Torres, F., Barniol, N. & IEEE, 2010, In: 2010 Ieee International Frequency Control Symposium (Fcs).Research output: Contribution to journal › Article › Research › peer-review
3 Citations (Scopus) -
Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators
Giner, J., Uranga, A., Torres, F., Marigó, E. & Barniol, N., 1 Apr 2010, In: Electronics Letters. 46, p. 640-641Research output: Contribution to journal › Article › Research › peer-review
15 Citations (Scopus) -
Linear operation of a 11MHz CMOS-MEMS Resonator
Marigo, E., Munoz-Gamarra, J. L., Giner, J., Lopez, J. L., Torres, F., Uranga, A., Barniol, N., Verd, J. & IEEE, 2010, In: 2010 Ieee International Frequency Control Symposium (Fcs).Research output: Contribution to journal › Article › Research › peer-review
2 Citations (Scopus) -
Third-mode 48 MHz free-free beam resonator used as a RF balun
López, J. L., Giner, J., Murillo, G., Torres, F., Marigó, E., Uranga, A., Abadal, G. & Barniol, N., May 2010, In: Microelectronic Engineering. 87, 5-8, p. 1256-1258 3 p.Research output: Contribution to journal › Article › Research › peer-review
2 Citations (Scopus) -
Zero-level packaging of MEMS in standard CMOS technology
Marigó, E., Lopez, J. L., Murillo, G., Torres, F., Giner, J., Uranga, A., Abadal, G., Esteve, J. & Barniol, N., 1 Jun 2010, In: Journal of Micromechanics and Microengineering. 20, 6, 064009.Research output: Contribution to journal › Article › Research › peer-review
16 Citations (Scopus) -
2009
A CMOS-MEMS RF-tunable bandpass filter based on two high-Q 22-MHz polysilicon clamped-clamped beam resonators
Lopez, J. L., Verd, J., Uranga, A., Giner, J., Murillo, G., Torres, F., Abadal, G. & Barniol, N., 20 Jul 2009, In: IEEE Electron Device Letters. 30, 7, p. 718-720 3 p.Research output: Contribution to journal › Article › Research › peer-review
75 Citations (Scopus) -
Analytical and finite-element modeling of localized-mass sensitivity of thin-film bulk acoustic-wave resonators (FBAR)
Campanella, H., Martincic, E., Nouet, P., Uranga, A. & Esteve, J., 1 Jan 2009, In: IEEE Sensors Journal. 9, p. 892-901 5153562.Research output: Contribution to journal › Article › Research › peer-review
12 Citations (Scopus) -
Electrically enhanced readout system for a high-frequency CMOS-MEMS resonator
Uranga, A., Verd, J., Lopez, J. L., Teva, J., Torres, F., Giner, J. J., Murillo, G., Abadal, G. & Barniol, N., 1 Aug 2009, In: ETRI Journal. 31, 4, p. 478-480 3 p.Research output: Contribution to journal › Article › Research › peer-review
Open Access8 Citations (Scopus) -
Harvester-on-chip: Design of a proof of concept prototype
Murillo, G., Abadal, G., Torres, F., Lopez, J. L., Giner, J., Uranga, A. & Barniol, N., 1 Apr 2009, In: Microelectronic Engineering. 86, p. 1183-1186Research output: Contribution to journal › Article › Research › peer-review
12 Citations (Scopus) -
High-frequency sensor technologies for inertial force detection based on thin-film bulk acoustic wave resonators (FBAR)
Campanella, H., Plaza, J. A., Montserrat, J., Uranga, A. & Esteve, J., 1 Apr 2009, In: Microelectronic Engineering. 86, 4-6, p. 1254-1257 4 p.Research output: Contribution to journal › Article › Research › peer-review
25 Citations (Scopus) -
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
Lopez, J. L., Verd, J., Teva, J., Murillo, G., Giner, J., Torres, F., Uranga, A., Abadal, G. & Barniol, N., 25 Mar 2009, In: Journal of Micromechanics and Microengineering. 19, 015002.Research output: Contribution to journal › Article › Research › peer-review
76 Citations (Scopus) -
Monolithically Integrated Double-Ended Tuning Fork- Based Oscillator with Low Bias Voltage in Air Conditions
Lopez, J. L., Verd, J., Marigó, E., Murillo, G., Giner, J., Torres, F., Abadal, G., Barniol, N. & Uranga, A., 1 Jan 2009, In: Procedia Chemistry. 1, 1, p. 614-617Research output: Contribution to journal › Article › Research
11 Citations (Scopus) -
Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography
Arcamone, J., Sansa, M., Verd, J., Uranga, A., Abadal, G., Barniol, N., Van Den Boogaart, M., Brugger, J. & Pérez-Murano, F., 19 Jan 2009, In: Small. 5, 2, p. 176-180 5 p.Research output: Contribution to journal › Article › Research › peer-review
28 Citations (Scopus) -
VHF band-pass filter based on a single CMOS-MEMS doubleended tuning fork resonator
Lopez, J. L., Verd, J., Uranga, A., Murillo, G., Giner, J., Marigó, E., Torres, F., Abadal, G. & Barniol, N., 2009, In: Procedia Chemistry. 1, 1, p. 1131-1134Research output: Contribution to journal › Article › Research › peer-review
12 Citations (Scopus)