Research output per year
Research output per year
- 1 - 50 out of 80 results
Search results
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2024
A Single-chip AlScN PMUTs-on-CMOS hydrophone
Ledesma, E., Uranga del Monte, A. & Barniol i Beumala, N., 1 Jul 2024, In: IEEE Sensors Journal. 24, 13, p. 21311-21320 10 p.Research output: Contribution to journal › Article › Research › peer-review
Open Access -
Fully Integrated Pitch-Matched AlScN PMUT-on-CMOS Array for High- Resolution Ultrasound Images
Ledesma, E., Uranga del Monte, A., Torres, F. & Barniol i Beumala, N., 15 May 2024, In: IEEE Sensors Journal. 24, 10, p. 15954-15966 13 p.Research output: Contribution to journal › Article › Research › peer-review
Open Access1 Citation (Scopus) -
2023
Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection
Torres, F., Uranga del Monte, A. & Barniol i Beumala, N., 3 Nov 2023, In: Sensors. 23, 21Research output: Contribution to journal › Article › Research › peer-review
Open Access -
2022
Fluid compressional properties sensing at microscale using a longitudinal bulk acoustic wave transducer operated in a pulse-echo scheme
Yanez, J., Uranga, A. & Barniol, N., 1 Feb 2022, In: Sensors and Actuators A: Physical. 334, 11 p., 113334.Research output: Contribution to journal › Article › Research › peer-review
Open Access5 Citations (Scopus) -
Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS
Zamora, I., Ledesma, E., Uranga, A. & Barniol, N., 1 Jul 2022, In: IEEE Electron Device Letters. 43, 7, p. 1113-1116 4 p.Research output: Contribution to journal › Article › Research › peer-review
12 Citations (Scopus) -
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
Ledesma, E., Zamora, I., Yanez, J., Uranga, A. & Barniol, N., 5 Jul 2022, In: Microsystems and Nanoengineering. 8, 1, 9 p., 76.Research output: Contribution to journal › Article › Research › peer-review
Open Access15 Citations (Scopus) -
2021
Enhancing aln pmuts’ acoustic responsivity within a mems-on-cmos process
Ledesma, E., Zamora, I., Uranga, A., Torres, F. & Barniol, N., 1 Dec 2021, In: Sensors. 21, 24, 8447.Research output: Contribution to journal › Article › Research › peer-review
Open Access11 Citations (Scopus) -
High accuracy ultrasound micro-distance measurements with pmuts under liquid operation
Zamora, I., Ledesma, E., Uranga, A. & Barniol, N., 1 Jul 2021, In: Sensors. 21, 13, 11 p., 13.Research output: Contribution to journal › Article › Research › peer-review
Open Access4 Citations (Scopus) -
Multielement ring array based on minute size pmuts for high acoustic pressure and tunable focus depth
Ledesma, E., Zamora, I., Uranga, A. & Barniol, N., 13 Jul 2021, In: Sensors. 21, 14, 18 p., 14.Research output: Contribution to journal › Article › Research › peer-review
Open Access5 Citations (Scopus) -
2020
Miniaturized 0.13-µm CMOS front-end analog for AlN PMUT arrays
Zamora, I., Ledesma, E., Uranga, A. & Barniol, N., 2 Feb 2020, In: Sensors. 20, 4, 1205.Research output: Contribution to journal › Article › Research › peer-review
Open Access31 Citations (Scopus) -
Monolithic Single PMUT-on-CMOS Ultrasound System with +17 dB SNR for Imaging Applications
Zamora, I., Ledesma, E., Uranga, A. & Barniol, N., 2020, In: IEEE Access. 8, p. 142785-142794 10 p., 9154376.Research output: Contribution to journal › Article › Research › peer-review
Open Access33 Citations (Scopus) -
Tent-Plate AlN PMUT with a Piston-Like Shape under Liquid Operation
Ledesma, E., Zamora, I., Uranga, A. & Barniol, N., 1 Oct 2020, In: IEEE Sensors Journal. 20, 19, p. 11128-11137 10 p., 9096364.Research output: Contribution to journal › Article › Research › peer-review
25 Citations (Scopus) -
2018
Fabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay
Riverola, M., Uranga, A., Torres, F. & Barniol, N., 15 May 2018, In: Microelectronic Engineering. 192, p. 44-51 8 p.Research output: Contribution to journal › Article › Research › peer-review
10 Citations (Scopus) -
High performance seesaw torsional CMOS-MEMS relay using tungsten VIA layer
Riverola, M., Uranga, A. & Barniol, N., 7 Nov 2018, In: Micromachines. 9, 579.Research output: Contribution to journal › Article › Research
3 Citations (Scopus) -
Squared PMUT with Enhanced Pressure Sensitivities
Ledesma, E., Zamora, I., Torres, F., Uranga, A., Tzanov, V., Barniol, N., Marigó, E. & Soundara-Pandian, M., 1 Jan 2018, In: Proceedings. 9, p. 925-930Research output: Contribution to journal › Article › Research
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2017
Optimization of the close-to-carrier Phase Noise in a CMOS-MEMS oscillator using a Phase Tunable Sustaining-Amplifier
Sobreviela, G., Riverola, M., Torres, F., Uranga, A. & Barniol, N., 1 May 2017, In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 64, 5, p. 888-897 7851036.Research output: Contribution to journal › Article › Research › peer-review
8 Citations (Scopus) -
Phase-Noise Reduction in a CMOS-MEMS Oscillator under Nonlinear MEMS Operation
Uranga, A., Sobreviela, G., Riverola, M., Torres, F. & Barniol, N., 1 Dec 2017, In: IEEE Transactions on Circuits and Systems I: Regular Papers. 64, 12, p. 3047-3055 9 p., 8077754.Research output: Contribution to journal › Article › Research › peer-review
9 Citations (Scopus) -
Single-resonator dual-frequency BEOL-embedded CMOS-MEMS oscillator with low-power and ultra-compact TIA core
Riverola, M., Sobreviela, G., Torres, F., Uranga, A. & Barniol, N., 1 Feb 2017, In: IEEE Electron Device Letters. 38, 2, p. 273-276 7797162.Research output: Contribution to journal › Article › Research › peer-review
23 Citations (Scopus) -
Suppression of the A-f-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles
Sobreviela, G., Vidal-Álvarez, G., Riverola, M., Uranga, A., Torres, F. & Barniol, N., 1 Apr 2017, In: Sensors and Actuators, A: Physical. 256, p. 59-65Research output: Contribution to journal › Article › Research › peer-review
18 Citations (Scopus) -
2016
A monolithically integrated torsional CMOS-MEMS relay
Riverola, M., Sobreviela, G., Torres, F., Uranga, A. & Barniol, N., 2016, In: Journal of Micromechanics and Microengineering.Research output: Contribution to journal › Article › Research › peer-review
10 Citations (Web of Science) -
A Monollithically Integrated Torsional CMOS-MEMS Relay
Riverola, M., Sobreviela, G., Torres, F., Uranga, A. & Barniol, N., 1 Jan 2016, In: Journal of Micromechanics and Microengineering. 26, p. 1150122-Research output: Contribution to journal › Article › Research
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CMOS-NEMS copper switches monolithically integrated using a 65 nm CMOS technology
Muñoz-Gamarra, J. L., Uranga, A. & Barniol, N., 1 Jan 2016, In: Micromachines. 7, 2, 30.Research output: Contribution to journal › Article › Research › peer-review
14 Citations (Scopus) -
Dynamic Properties of Three-Terminal Tungsten CMOS-NEM Relays Under Nonlinear Tapping Mode
Riverola, M., Vidal-Álvarez, G., Sobreviela, G., Uranga, A., Torres, F. & Barniol, N., 1 Jul 2016, In: IEEE Sensors Journal. 16, 13, p. 5283-5291 7463470.Research output: Contribution to journal › Article › Research › peer-review
17 Citations (Scopus) -
Enhancement of frequency stability using synchronization of a cantilever array for MEMS-based sensors
Torres, F., Uranga, A., Riverola, M., Sobreviela, G. & Barniol, N., 13 Oct 2016, In: Sensors. 16, 10, 1690.Research output: Contribution to journal › Article › Research › peer-review
10 Citations (Scopus) -
2015
CMOS-MEMS resonators: From devices to applications
Uranga, A., Verd, J. & Barniol, N., 25 Jan 2015, In: Microelectronic Engineering. 132, p. 58-73Research output: Contribution to journal › Review article › Research › peer-review
85 Citations (Scopus) -
Top-down CMOS-NEMS polysilicon nanowire with piezoresistive transduction
Marigó, E., Sansa, M., Pérez-Murano, F., Uranga, A. & Barniol, N., 14 Jul 2015, In: Sensors. 15, 7, p. 17036-17047 12 p.Research output: Contribution to journal › Article › Research › peer-review
2 Citations (Scopus) -
2014
CMOS-MEMS switches based on back-end metal layers
Muñoz-Gamarra, J. L., Vidal-Álvarez, G., Torres, F., Uranga, A. & Barniol, N., 1 May 2014, In: Microelectronic Engineering. 119, p. 127-130Research output: Contribution to journal › Article › Research › peer-review
12 Citations (Scopus) -
Nanomechanical switches based on metal-insulator-metal capacitors from a standard complementary-metal-oxide semiconductor technology
Muñoz-Gamarra, J. L., Uranga, A. & Barniol, N., 16 Jun 2014, In: Applied physics letters. 104, 24, 243105.Research output: Contribution to journal › Article › Research › peer-review
15 Citations (Scopus) -
2013
Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories
Uranga, A., Verd, J., Marigó, E., Giner, J., Muñóz-Gamarra, J. L. & Barniol, N., 14 May 2013, In: Sensors and Actuators, A: Physical. 197, p. 88-95Research output: Contribution to journal › Article › Research › peer-review
59 Citations (Scopus) -
Integration of NEMS resonators in a 65 nm CMOS technology
Gamarra, J. L. M., Alcaide, P., Marigó, E., Giner, J., Uranga, A., Esteve, J. & Barniol, N., 1 Jan 2013, In: Microelectronic Enginering. 110, p. 246-249Research output: Contribution to journal › Article › Research › peer-review
29 Citations (Scopus) -
Packaged CMOS-MEMS free-free beam oscillator
Marigó, E., Verd, J., López, J. L., Uranga, A. & Barniol, N., 1 Nov 2013, In: Journal of Micromechanics and Microengineering. 23, 11, 115018.Research output: Contribution to journal › Article › Research › peer-review
11 Citations (Scopus) -
2012
A 230 MHz CMOS-MEMS bulk acoustic wave resonator
Marigó, E., Muñoz-Gamarra, J. L., Giner, J., Uranga, A. & Barniol, N., 1 Jan 2012, In: Microelectronic Engineering. 98, p. 458-462Research output: Contribution to journal › Article › Research
4 Citations (Scopus) -
A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators
Giner, J., Uranga, A., Muñóz-Gamarra, J. L., Marigó, E. & Barniol, N., 1 May 2012, In: Journal of Micromechanics and Microengineering. 22, 5, 055020.Research output: Contribution to journal › Article › Research › peer-review
15 Citations (Scopus) -
Cancellation of the Parasitic Feedthrough Current in an Integrated CMOS-MEMS Clamped- Clamped Beam Resonator
J. Giner, A. U. & Barniol, N., 1 Jan 2012, In: Microelectronic Engineering. 98, p. 599-602Research output: Contribution to journal › Article › Research
7 Citations (Scopus) -
VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator
Giner, J., Uranga, A., Muñoz-Gamarra, J. L., Marigó, E. & Barniol, N., 26 Apr 2012, In: Electronics Letters. 48, 9, p. 514-516 3 p.Research output: Contribution to journal › Article › Research › peer-review
3 Citations (Scopus) -
2011
Cross Coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection
Marigó, E., Muñoz-Gamarra, J. L., Vidal, G., Giner, J., Torres, F., Uranga, A. & Barniol, N., 1 Jan 2011, In: Microelectronic Engineering. 88, 8, p. 2325- 2329Research output: Contribution to journal › Article › Research
5 Citations (Scopus) -
Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution
Verd, J., Sansa, M., Uranga, A., Perez-Murano, F., Segura, J. & Barniol, N., 21 Aug 2011, In: Lab on a Chip Journal. 11, 6, p. 2670-2672Research output: Contribution to journal › Review article › Research › peer-review
21 Citations (Scopus) -
2010
A CMOS-MEMS filter using a V-coupler and electrical phase inversion
Giner, J., Uranga, A., Torres, F., Marigo, E., Gamarra, J. L. M. & Barniol, N., 2010, In: 2010 IEEE International Frequency Control Symposium, FCS 2010. p. 344-348 5 p.Research output: Contribution to journal › Article › Research › peer-review
6 Citations (Scopus) -
CHARACTERIZATION OF CMOS-MEMS RESONATOR BY PULSED MODE ELECTROSTATIC ACTUATION
Munoz-Gamarra, J. L., Marigo, E., Giner, J., Uranga, A., Torres, F., Barniol, N. & IEEE, 2010, In: 2010 Ieee International Frequency Control Symposium (Fcs).Research output: Contribution to journal › Article › Research › peer-review
3 Citations (Scopus) -
Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators
Giner, J., Uranga, A., Torres, F., Marigó, E. & Barniol, N., 1 Apr 2010, In: Electronics Letters. 46, p. 640-641Research output: Contribution to journal › Article › Research › peer-review
15 Citations (Scopus) -
Linear operation of a 11MHz CMOS-MEMS Resonator
Marigo, E., Munoz-Gamarra, J. L., Giner, J., Lopez, J. L., Torres, F., Uranga, A., Barniol, N., Verd, J. & IEEE, 2010, In: 2010 Ieee International Frequency Control Symposium (Fcs).Research output: Contribution to journal › Article › Research › peer-review
2 Citations (Scopus) -
Third-mode 48 MHz free-free beam resonator used as a RF balun
López, J. L., Giner, J., Murillo, G., Torres, F., Marigó, E., Uranga, A., Abadal, G. & Barniol, N., May 2010, In: Microelectronic Engineering. 87, 5-8, p. 1256-1258 3 p.Research output: Contribution to journal › Article › Research › peer-review
2 Citations (Scopus) -
Zero-level packaging of MEMS in standard CMOS technology
Marigó, E., Lopez, J. L., Murillo, G., Torres, F., Giner, J., Uranga, A., Abadal, G., Esteve, J. & Barniol, N., 1 Jun 2010, In: Journal of Micromechanics and Microengineering. 20, 6, 064009.Research output: Contribution to journal › Article › Research › peer-review
16 Citations (Scopus) -
2009
A CMOS-MEMS RF-tunable bandpass filter based on two high-Q 22-MHz polysilicon clamped-clamped beam resonators
Lopez, J. L., Verd, J., Uranga, A., Giner, J., Murillo, G., Torres, F., Abadal, G. & Barniol, N., 20 Jul 2009, In: IEEE Electron Device Letters. 30, 7, p. 718-720 3 p.Research output: Contribution to journal › Article › Research › peer-review
75 Citations (Scopus) -
Analytical and finite-element modeling of localized-mass sensitivity of thin-film bulk acoustic-wave resonators (FBAR)
Campanella, H., Martincic, E., Nouet, P., Uranga, A. & Esteve, J., 1 Jan 2009, In: IEEE Sensors Journal. 9, p. 892-901 5153562.Research output: Contribution to journal › Article › Research › peer-review
12 Citations (Scopus) -
Electrically enhanced readout system for a high-frequency CMOS-MEMS resonator
Uranga, A., Verd, J., Lopez, J. L., Teva, J., Torres, F., Giner, J. J., Murillo, G., Abadal, G. & Barniol, N., 1 Aug 2009, In: ETRI Journal. 31, 4, p. 478-480 3 p.Research output: Contribution to journal › Article › Research › peer-review
Open Access8 Citations (Scopus) -
Harvester-on-chip: Design of a proof of concept prototype
Murillo, G., Abadal, G., Torres, F., Lopez, J. L., Giner, J., Uranga, A. & Barniol, N., 1 Apr 2009, In: Microelectronic Engineering. 86, p. 1183-1186Research output: Contribution to journal › Article › Research › peer-review
12 Citations (Scopus) -
High-frequency sensor technologies for inertial force detection based on thin-film bulk acoustic wave resonators (FBAR)
Campanella, H., Plaza, J. A., Montserrat, J., Uranga, A. & Esteve, J., 1 Apr 2009, In: Microelectronic Engineering. 86, 4-6, p. 1254-1257 4 p.Research output: Contribution to journal › Article › Research › peer-review
25 Citations (Scopus) -
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
Lopez, J. L., Verd, J., Teva, J., Murillo, G., Giner, J., Torres, F., Uranga, A., Abadal, G. & Barniol, N., 25 Mar 2009, In: Journal of Micromechanics and Microengineering. 19, 015002.Research output: Contribution to journal › Article › Research › peer-review
76 Citations (Scopus) -
Monolithically Integrated Double-Ended Tuning Fork- Based Oscillator with Low Bias Voltage in Air Conditions
Lopez, J. L., Verd, J., Marigó, E., Murillo, G., Giner, J., Torres, F., Abadal, G., Barniol, N. & Uranga, A., 1 Jan 2009, In: Procedia Chemistry. 1, 1, p. 614-617Research output: Contribution to journal › Article › Research
11 Citations (Scopus)