Keyphrases
CMOS Technology
43%
Resonator
37%
CMOS-MEMS
37%
Complementary Metal Oxide Semiconductor
35%
Monolithically Integrated
28%
Film Bulk Acoustic Resonator
24%
Piezoelectric Micromachined Ultrasonic Transducer (pMUT)
23%
Integrated CMOS
22%
Resonant Frequency
21%
Polysilicon
20%
MEMS Resonator
20%
Fully Integrated
19%
On chip
18%
Mass Sensor
17%
Clamped Beam
17%
Micro-electro-mechanical Systems
17%
Cantilever
14%
Beam Resonators
13%
Aluminum Scandium Nitride (AlScN)
13%
Complementary Metal-oxide-semiconductor Technology
12%
Microelectromechanical Systems (MEMS) Resonator
11%
Standard CMOS Technology
11%
Localized Masses
11%
Filter Method
10%
RF MEMS Resonator
10%
Tungsten
9%
Metal Layer
9%
Circuitry
9%
MEMS Filter
9%
NEMS Resonator
8%
Air Condition
8%
Fabrication Methods
8%
CMOS Process
8%
High Sensitivity
8%
Electrical Characterization
8%
CMOS-NEMS
7%
Micromechanics
7%
MEMS Oscillator
7%
Nanoelectromechanical Systems
7%
Free-free Beam
7%
Responsivity
7%
Electrical Detection
7%
CMOS Integrated
7%
Attogram
7%
Array-based
7%
Acoustic Pressure
6%
CMOS Circuits
6%
Oscillator Circuit
6%
Mass Sensitivity
6%
Crystalline Silicon
6%
Engineering
Resonator
100%
Microelectromechanical System
89%
Transducer
34%
Complementary Metal-Oxide-Semiconductor
31%
Thin Films
24%
Oscillator
22%
Piezoelectric
21%
Amplifier
19%
Ultrasonics
18%
Capacitive
16%
Polysilicon
13%
Resonance Frequency
13%
Bandpass Filter
10%
Phase Noise
9%
Responsivity
8%
Echo Pulse
8%
High Resolution
8%
Q Factor
7%
Air Condition
6%
Metal Layer
6%
Front End
6%
Acoustic Pressure
6%
Electrical Impedance
5%
Crystalline Silicon
5%
Readout Circuit
5%
Integrated System
5%
Resonant Frequency
5%
Monolithic Integration
5%
