Keyphrases
Piezoelectric Micromachined Ultrasonic Transducer (pMUT)
63%
Aluminum Scandium Nitride (AlScN)
53%
Complementary Metal Oxide Semiconductor
38%
Hydrophone
31%
Acoustic Pressure
31%
Ultrasound Image
25%
Receiving Sensitivity
20%
Fluid Hydrodynamics
19%
Cell Systems
19%
Hydrodynamic Properties
19%
Sound Velocity
19%
Viscosity
19%
CMOS Array
19%
Single chip
19%
Fully Integrated
19%
Transducer on CMOS
19%
High-resolution Ultrasound
19%
Distance Measure
19%
Tunable Focusing
19%
Depth of Focus
19%
Responsivity
19%
Multi-element
19%
Array-based
19%
Ultrasound
19%
Ring Array
19%
Micromachined Ultrasound Transducers
19%
Acoustics
19%
Experimental Verification
15%
Acoustic Measurements
13%
Continuous Wave
12%
Multi-frequency Continuous Waves
12%
Multipath Reflection
12%
Ultrasound Imaging
12%
Imaging Capability
12%
Low Noise Amplifier
10%
High Performance
10%
Dual Electrode
9%
Piezoelectric Devices
9%
Fluid Compressibility
9%
Compressibility Coefficient
9%
Fluid Density
9%
Transducer System
9%
Acoustic Transducers
9%
Fluid Measurement
9%
Amplitude Frequency
9%
Semiconductor Process
9%
Two-port
9%
Single Device
9%
Frequency Shift
9%
Fluid Viscosity
9%
Engineering
Transducer
100%
Ultrasonics
60%
Piezoelectric
55%
Complementary Metal-Oxide-Semiconductor
38%
High Resolution
38%
Acoustic Pressure
30%
Amplifier
26%
Hydrodynamics
19%
Fluid Viscosity
19%
Single Chip
19%
Robust Design
19%
Output Pressure
19%
Equivalent Diameter
19%
Focus Depth
19%
Continuous Wave
19%
Responsivity
19%
Echo Pulse
19%
Crosstalk
19%
Sound Velocity
12%
Compressibility
12%
Low Noise Amplifier
7%
Experimental Result
7%
Fluid Density
6%
Resonator
6%
Measurement System
6%
Piezoelectric Device
6%
Single Device
6%
Frequency Shift
6%
Fem Model
6%
Residual Stress
6%
Thin Layer
6%
