Keyphrases
Complementary Metal Oxide Semiconductor
51%
Resonator
44%
CMOS Technology
42%
CMOS-MEMS
36%
Microcantilever
32%
Monolithically Integrated
31%
Piezoelectric Micromachined Ultrasonic Transducer (pMUT)
26%
Cantilever
26%
Energy Harvesting
25%
Energy Harvester
25%
MEMS Resonator
25%
Fully Integrated
23%
Complementary Metal-oxide-semiconductor Technology
23%
Resonant Frequency
22%
Nanoelectromechanical Systems
19%
Circuitry
19%
Nonlinearity
17%
Tungsten
17%
Metal Layer
17%
Frequency Response
17%
Clamped Beam
16%
Compressive Strain
15%
Polysilicon
15%
MEMS Devices
15%
NEMS Resonator
15%
Nanoribbon
14%
CMOS-NEMS
14%
MEMS Oscillator
14%
MEMS Filter
12%
Silicalite
12%
Cantilever Array
12%
Suspended Graphene Nanoribbon
12%
Filter Method
12%
Integrated CMOS
12%
Low Power
12%
Aluminum Scandium Nitride (AlScN)
12%
Energy Harvesting System
11%
Microelectromechanical Resonators
10%
Sensor-based
10%
Ambient Vibration
10%
Electrical Energy
10%
Pull-in Voltage
9%
Bandpass Filter
9%
Hexagonal Boron Nitride (h-BN)
9%
Microfluidic Sensor
9%
Mechanical Coupling
9%
Energy Sources
9%
Nanoelectromechanical Switch
9%
Contact Mode
9%
Beam Resonators
9%
Mass Sensor
9%
Readout Circuitry
9%
Micro-electro-mechanical Systems
9%
Standard CMOS Technology
9%
Frequency Stability
9%
Antenna
8%
Nanoporous
8%
Hysteretic Cycle
8%
Seesaw
8%
Inertial Mass
8%
Amplitude Modulation
8%
Free-free Beam
8%
Responsivity
8%
Fabrication Methods
8%
Resonance Behavior
8%
CMOS Front-end
8%
Ultrasound System
8%
Cantilever Resonator
7%
Zero Level
7%
Microstrip
7%
Complementary Split Ring Resonator
7%
Mechanical Vibration
7%
Silicon Nanowires (SiNWs)
7%
High Performance
7%
Electrical Frequency
7%
Nanowires
7%
Phase Noise
6%
Mass Sensitivity
6%
Nonlinear Regime
6%
Tapping Mode
6%
NEM Relay
6%
Vibration State
6%
Parasitic Currents
6%
Current Conveyor
6%
Hybrid Resonance
6%
Sustaining Amplifiers
6%
Power Density Maximization
6%
Self-suspended
6%
Vibration-driven
6%
MEMS Sensor
6%
Electret
6%
Carrier Phase Noise
6%
Phase Tunable
6%
Nonlinear Vibration
6%
Nonlinear Energy Harvester
6%
Bulk Acoustic Wave Resonator
6%
Sensing Performance
6%
Micromechanical Sensors
6%
Polysilicon Nanowires
6%
Mechanical Antenna
6%
Engineering
Resonator
100%
Microelectromechanical System
99%
Complementary Metal-Oxide-Semiconductor
44%
Piezoelectric
38%
Energy Engineering
37%
Harvester
34%
Microcantilevers
32%
Transducer
32%
Ultrasonics
26%
Oscillator
25%
Resonance Frequency
23%
Nanowire
18%
Amplifier
18%
Phase Noise
15%
Capacitive
13%
Frequency Response
12%
Silicalite
12%
Bandpass Filter
12%
Graphene
12%
Energy Harvesting
12%
Antenna
12%
Metal Layer
12%
Bistables
11%
Responsivity
10%
Polysilicon
10%
Monolayers
9%
Nonlinearity
9%
Front End
9%
Pull-in Voltage
8%
Nonlinear Vibration
8%
Compressive Strain
8%
Lithography
8%
High Resolution
8%
Q Factor
7%
Actuation
7%
Electrical Power
7%
Electrostatic Force
6%
Level Packaging
6%
Gaussian White Noise
6%
Phase-Inversion
6%
Balun
6%
Dielectrics
6%
Sensing Performance
6%
Sensor Fabrication
6%
Wireless Sensor Node
6%
Resonant Energy
6%
Mechanical Coupling
6%
Micro-Cantilevers
6%
Bifurcation Point
6%
Casimir Force
6%
Electret
6%
Metal Oxide Semiconductor
6%
Deposition Rate
6%
Wireless Power Transfer
6%
2D Material
6%
Carrier Phase
6%
Amplitude Modulation
6%
Element Array
6%
Tapping (Threads)
6%
Conveyor
6%
Maximization
6%
Dynamic Property
6%
Root Mean Square
6%
Power Density
6%
Wireless Communication
6%
Gaussians
6%
Tapping Mode
6%
Nanoelectromechanical System
6%
Resonant Frequency
6%
Property Characterization
6%
Single Chip
6%
Harmonics
5%
Experimental Measurement
5%
Potential Energy
5%
Engineering
5%