Replication Data for: Reliability Assessment of Optical Physical Unclonable Functions based on the Spatial Distribution of Catastrophic Failure Sites in MIM Structures

This dataset contains the optical images obtained on MIM structures after inducing multiple Dielectric Breakdowns (BD) of the gate stack. The images were taken under different conditions, in order to evaluate the suitability of the post-BD images as entropy source for the implementation of Physical Unclonable Functions (PUF) in security applications. In total, 9 devices were measured, under each of the conditions. The dataset corresponds to the set of images obtained without any type of processing.