VHFCMOS-MEMS resonator monolithically integrated in a standard 0.35 mu m CMOS technology

TY - JOUR

T1 - VHFCMOS-MEMS resonator monolithically integrated in a standard 0.35 mu m CMOS technology

AU - Teva, J.

AU - Abadal, G.

AU - Uranga, A.

AU - Verd, J.

AU - Torres, F.

AU - Lopez, J. L.

AU - Esteve, J.

AU - Perez-Murano, F.

AU - Barniol, N.

PY - 2007

Y1 - 2007

M3 - Article

JO - Proceedings of the Ieee Twentieth Annual International Conference on Micro Electro Mechanical Systems, Vols 1 and 2

JF - Proceedings of the Ieee Twentieth Annual International Conference on Micro Electro Mechanical Systems, Vols 1 and 2

ER -