Resum
The time-resolved evaporation rate of small glycerine drops (in the attoliter range) is determined by means of a mass sensor based on a resonant cantilever integrated in a CMOS chip. The cantilever is fabricated on crystalline silicon, using silicon-on-insulator (SOI) substrates for the integration of the CMOS-MEMS. Glycerine drops are deposited at the free end of the cantilever. The high mass sensitivity of the sensor (8 ag/Hz) allows to determine the evaporation rate for glycerine drops smaller than 500 aL, which are found to be below 3.2 aL/s in volume or 4 fg/s in mass. © 2007 IEEE.
Idioma original | English |
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Pàgines (de-a) | 509-512 |
Revista | IEEE Transactions on Nanotechnology |
Volum | 6 |
Número | 5 |
DOIs | |
Estat de la publicació | Publicada - 1 de set. 2007 |