Test structures for MCM-D Technology Characterization

M. Lozano; J. Santander; E. Cabruna; C. Perelló; M. Ullán; LORA-TAMAYO E.; R. Doyle; G. Mc Carthy; J. Barton

doi:10.1109/66.762876

Test structures for MCM-D Technology Characterization

M. Lozano, J. Santander, E. Cabruna, C. Perelló, M. Ullán, LORA-TAMAYO E., R. Doyle, G. Mc Carthy, J. Barton

Producció científica: Contribució a revista › Article › Recerca

Idioma original	Anglès
Pàgines (de-a)	184-192
Revista	IEEE Transactions on Semiconductor Manufacturing
Volum	12
Número	2
DOIs	https://doi.org/10.1109/66.762876
Estat de la publicació	Publicada - 1 de gen. 1999

Accés al document

10.1109/66.762876

Altres arxius i enllaços

https://www.scopus.com/pages/publications/0033363407

Com citar-ho

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author = "M. Lozano and J. Santander and E. Cabruna and C. Perell{\'o} and M. Ull{\'a}n and LORA-TAMAYO E. and R. Doyle and Carthy, \{G. Mc\} and J. Barton",

year = "1999",

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journal = "IEEE Transactions on Semiconductor Manufacturing",

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AU - Santander, J.

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AU - Ullán, M.

AU - E., LORA-TAMAYO

AU - Doyle, R.

AU - Carthy, G. Mc

AU - Barton, J.

PY - 1999/1/1

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