Structural, optical and electrical properties of state of the art cubic SiC films

J. Stoemenos; C. Dezauzier; G. Arnaud; S. Contreras; J. Camassel; J. Pascual; J. L. Robert

doi:10.1016/0921-5107(94)04037-5

Structural, optical and electrical properties of state of the art cubic SiC films

J. Stoemenos, C. Dezauzier, G. Arnaud, S. Contreras, J. Camassel, J. Pascual, J. L. Robert

Departament de Física

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The structural, optical and electrical characteristics of commercially available cubic (β)-SiC films grown on 〈001〉 silicon waters were reported. For the structural characterization, combined plane view and cross-section transmission electron spectroscopy observations were made. For the optical investigations, low-temperature photoluminescence (2 K) and room temperature Raman and infrared spectra were measured. For the electrical characterization, Hall effect and resistivity measurements were performed in the temperature range 15-500 K. © 1995.

Idioma original	Anglès
Pàgines (de-a)	160-164
Revista	Materials Science and Engineering B
Volum	29
DOIs	https://doi.org/10.1016/0921-5107(94)04037-5
Estat de la publicació	Publicada - 1 de gen. 1995

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10.1016/0921-5107(94)04037-5

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@article{7be5bd81a32444ee912cfeeb2b9a999e,

title = "Structural, optical and electrical properties of state of the art cubic SiC films",

abstract = "The structural, optical and electrical characteristics of commercially available cubic (β)-SiC films grown on 〈001〉 silicon waters were reported. For the structural characterization, combined plane view and cross-section transmission electron spectroscopy observations were made. For the optical investigations, low-temperature photoluminescence (2 K) and room temperature Raman and infrared spectra were measured. For the electrical characterization, Hall effect and resistivity measurements were performed in the temperature range 15-500 K. {\textcopyright} 1995.",

keywords = "Electrical measurements, Optical properties, Silicon carbide, Transmission electron microscopy",

author = "J. Stoemenos and C. Dezauzier and G. Arnaud and S. Contreras and J. Camassel and J. Pascual and Robert, {J. L.}",

year = "1995",

month = jan,

day = "1",

doi = "10.1016/0921-5107(94)04037-5",

language = "English",

volume = "29",

pages = "160--164",

journal = "Materials Science and Engineering B",

issn = "0921-5107",

publisher = "Taylor and Francis Ltd.",

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TY - JOUR

T1 - Structural, optical and electrical properties of state of the art cubic SiC films

AU - Stoemenos, J.

AU - Dezauzier, C.

AU - Arnaud, G.

AU - Contreras, S.

AU - Camassel, J.

AU - Pascual, J.

AU - Robert, J. L.

PY - 1995/1/1

Y1 - 1995/1/1

N2 - The structural, optical and electrical characteristics of commercially available cubic (β)-SiC films grown on 〈001〉 silicon waters were reported. For the structural characterization, combined plane view and cross-section transmission electron spectroscopy observations were made. For the optical investigations, low-temperature photoluminescence (2 K) and room temperature Raman and infrared spectra were measured. For the electrical characterization, Hall effect and resistivity measurements were performed in the temperature range 15-500 K. © 1995.

AB - The structural, optical and electrical characteristics of commercially available cubic (β)-SiC films grown on 〈001〉 silicon waters were reported. For the structural characterization, combined plane view and cross-section transmission electron spectroscopy observations were made. For the optical investigations, low-temperature photoluminescence (2 K) and room temperature Raman and infrared spectra were measured. For the electrical characterization, Hall effect and resistivity measurements were performed in the temperature range 15-500 K. © 1995.

KW - Electrical measurements

KW - Optical properties

KW - Silicon carbide

KW - Transmission electron microscopy

U2 - 10.1016/0921-5107(94)04037-5

DO - 10.1016/0921-5107(94)04037-5

M3 - Article

SN - 0921-5107

VL - 29

SP - 160

EP - 164

JO - Materials Science and Engineering B

JF - Materials Science and Engineering B

ER -

Structural, optical and electrical properties of state of the art cubic SiC films

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