Keyphrases
Piezoelectric Micromachined Ultrasonic Transducer (pMUT)
100%
Viscosity
100%
Complementary Metal Oxide Semiconductor
100%
Cell Systems
100%
Sound Velocity
100%
Hydrodynamic Properties
100%
Fluid Hydrodynamics
100%
Resonator
50%
Experimental Verification
50%
Measurement System
50%
Single Device
50%
Fluid Viscosity
50%
Amplitude Variation
50%
Electrode Configuration
50%
Frequency Shift
50%
Compressibility
50%
Viscosity Coefficient
50%
Acoustic Measurements
50%
Amplitude Frequency
50%
Two-port
50%
Semiconductor Process
50%
Aluminum Scandium Nitride (AlScN)
50%
Dual Electrode
50%
Piezoelectric Devices
50%
Fluid Compressibility
50%
Fluid Density
50%
Compressibility Coefficient
50%
Transducer System
50%
Acoustic Transducers
50%
Fluid Measurement
50%
Engineering
Complementary Metal-Oxide-Semiconductor
100%
Hydrodynamics
100%
Transducer
100%
Fluid Viscosity
100%
Piezoelectric
66%
Sound Velocity
66%
Ultrasonics
66%
Compressibility
66%
Measurement System
33%
Single Device
33%
Resonator
33%
Frequency Shift
33%
Piezoelectric Device
33%
Fluid Density
33%
Material Science
Piezoelectricity
100%
Complementary Metal-Oxide-Semiconductor Device
100%
Hydrodynamics
100%
Density
66%
Compressibility
66%
Resonator
33%
Chemical Engineering
Oxide Semiconductors
100%