RIE induced damage in MOS structures

A. de Dios, E. Castán, L. Bailón, J. Barbolla, M. Lozano, LORA TAMAYO E.

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@article{674933782b654005a080b5413270191b,

title = "RIE induced damage in MOS structures",

author = "Dios, {A. de} and E. Cast{\'a}n and L. Bail{\'o}n and J. Barbolla and M. Lozano and E., {LORA TAMAYO}",

year = "1990",

month = jan,

day = "1",

language = "English",

volume = "33",

pages = "1419--1423",

journal = "Solid-state electronics",

issn = "0038-1101",

publisher = "Elsevier Limited",

number = "11",

}