@inbook{6689c570cfa34f8489b7193fa0988464,
title = "Resonating cantilever mass sensor with mechanical on-plane excitation",
author = "J. Teva and G. Abadal and X. Jord{\`a} and X. Borris{\'e} and Z. Davis and N. Barniol and {editors: Jung-Chih Chiao}, {Vijay K. Varadan}",
year = "2003",
month = jan,
day = "1",
language = "English",
isbn = "978-0-8194-4976-4",
series = "Proceedings of SPIE--the International Society for Optical Engineering ; 5116",
pages = "353--363",
booktitle = "Smart Sensors, Actuators, and MEMS : 19-21 May 2003 : Maspalomas, Gran Canaria, Spain",
edition = "1",
}