Reconstructing 3D light microscopic images using the EM algorithm

An iterative method to recover perfectly focused images from a set of light microscopic images is proposed. The method is based on the EM algorithm, and it assumes a prior knowledge about the Point Spread Function of the optical system, as well as about the optical parameter settings of the acquisition system. The method is applied to the visualization of integrated circuit samples through an optical microscope and to the recovery of their depth information.