Proceedings of the Micro System Technologies'98: "Doping Analysis of Polysilicon Layers for the Achievement of the Capacitive Sensors by Surface Micromachinig Technology": Conference on Micro, Electro, Opto, Mechanical Systems and Compounds, Micro System Technologies'98

F. Gaiseanu; J. Esteve; A. Pérez-Rodríguez; J.R. Morante

Proceedings of the Micro System Technologies'98: "Doping Analysis of Polysilicon Layers for the Achievement of the Capacitive Sensors by Surface Micromachinig Technology": Conference on Micro, Electro, Opto, Mechanical Systems and Compounds, Micro System Technologies'98

F. Gaiseanu, J. Esteve, A. Pérez-Rodríguez, J.R. Morante

Producció científica: LLibre/informe › Llibre d'Actes › Recerca

Idioma original	Anglès
Lloc de publicació	Potsdam (DE)
Nombre de pàgines	3
Estat de la publicació	Publicada - de des. 1998

Com citar-ho

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title = "Proceedings of the Micro System Technologies'98: {"}Doping Analysis of Polysilicon Layers for the Achievement of the Capacitive Sensors by Surface Micromachinig Technology{"}: Conference on Micro, Electro, Opto, Mechanical Systems and Compounds, Micro System Technologies'98",

author = "F. Gaiseanu and J. Esteve and A. P{\'e}rez-Rodr{\'i}guez and J.R. Morante",

year = "1998",

month = dec,

language = "English",

}

Proceedings of the Micro System Technologies'98: "Doping Analysis of Polysilicon Layers for the Achievement of the Capacitive Sensors by Surface Micromachinig Technology": Conference on Micro, Electro, Opto, Mechanical Systems and Compounds, Micro System Technologies'98. / Gaiseanu, F.; Esteve, J.; Pérez-Rodríguez, A. et al.
Potsdam (DE), 1998. 3 pàg.

Producció científica: LLibre/informe › Llibre d'Actes › Recerca

TY - BOOK

T1 - Proceedings of the Micro System Technologies'98: "Doping Analysis of Polysilicon Layers for the Achievement of the Capacitive Sensors by Surface Micromachinig Technology"

T2 - Conference on Micro, Electro, Opto, Mechanical Systems and Compounds, Micro System Technologies'98

AU - Gaiseanu, F.

AU - Esteve, J.

AU - Pérez-Rodríguez, A.

AU - Morante, J.R.

PY - 1998/12

Y1 - 1998/12

M3 - Proceeding

BT - Proceedings of the Micro System Technologies'98: "Doping Analysis of Polysilicon Layers for the Achievement of the Capacitive Sensors by Surface Micromachinig Technology"

CY - Potsdam (DE)

ER -