TY - JOUR
T1 - Photocurable polymers applied as encapsulating materials for ISFET production
AU - Bratov, A.
AU - Muñoz, J.
AU - Dominguez, C.
AU - Bartrolí, J.
PY - 1995/1/1
Y1 - 1995/1/1
N2 - Promising materials for semiconductor-based chemical sensors are photocurable polymers that can be applied utilizing conventional photolithographic processes compatible with microelectronic technology. In this work different acrylate-based polymers curable under UV irradiation have been tested for their applicability as packaging materials. A mixture consisting of acrylate oligomer (epoxy, urethane, siloxane, polyester), reactive monomers and suitable photoinitiator is applied to a wirebonded sensor chip to form a thick (100-1000 μm) polymer layer. After exposure and development, a window is opened over the gate region. Results on polymer-layer adhesion, electrical resistivity, chemical resistance and lifetime of the encapsulated microsensors in various aqueous solutions are presented. © 1995.
AB - Promising materials for semiconductor-based chemical sensors are photocurable polymers that can be applied utilizing conventional photolithographic processes compatible with microelectronic technology. In this work different acrylate-based polymers curable under UV irradiation have been tested for their applicability as packaging materials. A mixture consisting of acrylate oligomer (epoxy, urethane, siloxane, polyester), reactive monomers and suitable photoinitiator is applied to a wirebonded sensor chip to form a thick (100-1000 μm) polymer layer. After exposure and development, a window is opened over the gate region. Results on polymer-layer adhesion, electrical resistivity, chemical resistance and lifetime of the encapsulated microsensors in various aqueous solutions are presented. © 1995.
KW - ISFETs
KW - Photocurable polymers
KW - Sensor packaging
U2 - 10.1016/0925-4005(95)85183-6
DO - 10.1016/0925-4005(95)85183-6
M3 - Article
SN - 0925-4005
VL - 25
SP - 823
EP - 825
JO - Sensors and Actuators: B. Chemical
JF - Sensors and Actuators: B. Chemical
IS - 1-3
ER -