Resum
The construction of a pH‐ISFET (ion‐selective field effect transistor) fabricated with standard negative‐channel MOS technology, compatible with complementary MOS technology, and using silicon nitride as a pH‐sensitive material, is described. Its main analytical characteristics are discussed. The resulting calibration plot is linear over the pH range from 2 to 11; with a slope of 54 mV per pH unit. Copyright © 1991 VCH Publishers, Inc.
| Idioma original | Anglès |
|---|---|
| Pàgines (de-a) | 355-360 |
| Revista | Electroanalysis |
| Volum | 3 |
| Número | 4-5 |
| DOIs | |
| Estat de la publicació | Publicada - 1 de gen. 1991 |