Optical imaging of small structures in optical lithography. High focal depth with optical filters

R. Hild, J.C. Escalera, M.J. Yzuel, G. Nitzsche, U. Altenburger

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@article{805686471a7b4cf09de79309a3b7071a,

title = "Optical imaging of small structures in optical lithography. High focal depth with optical filters",

author = "R. Hild and J.C. Escalera and M.J. Yzuel and G. Nitzsche and U. Altenburger",

year = "1996",

month = jan,

day = "1",

language = "English",

pages = "79--80",

journal = "Proc. SPIE",

issn = "0277-786X",

number = "2778",

}

TY - JOUR

T1 - Optical imaging of small structures in optical lithography. High focal depth with optical filters

AU - Hild, R.

AU - Escalera, J.C.

AU - Yzuel, M.J.

AU - Nitzsche, G.

AU - Altenburger, U.

PY - 1996/1/1

Y1 - 1996/1/1

UR - https://www.scopus.com/pages/publications/84887372470

M3 - Article

SN - 0277-786X

SP - 79

EP - 80

JO - Proc. SPIE

JF - Proc. SPIE

IS - 2778

ER -