On the oxide interface microroughness in MOS decives

I. Placencia, J. Suñé, E. Farrés, N. Barniol, X. Aymerich

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@article{42001e9fbcf34421b3dee16398aabdab,

title = "On the oxide interface microroughness in MOS decives",

author = "I. Placencia and J. Su{\~n}{\'e} and E. Farr{\'e}s and N. Barniol and X. Aymerich",

year = "1989",

month = jan,

day = "1",

language = "English",

volume = "39",

pages = "771--774",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier Limited",

}