Nordic-Baltic SPM Workshop. "Laser and AFM Lithography on Aluminum- a Fabrication Tool for Nanomechanical Devices".: Nordic-Baltic SPM

Nordic-Baltic SPM Workshop. "Laser and AFM Lithography on Aluminum- a Fabrication Tool for Nanomechanical Devices". Nordic-Baltic SPM

A. Boisen, K. Birkelun, G. Abadal, Z.J. Davis, O. Hansen, F. Grey

Producció científica: Llibre/Informe › Llibre d'Actes › Recerca

TY - BOOK

T1 - Nordic-Baltic SPM Workshop. "Laser and AFM Lithography on Aluminum- a Fabrication Tool for Nanomechanical Devices".

T2 - Nordic-Baltic SPM

AU - Boisen, A.

AU - Birkelun, K.

AU - Abadal, G.

AU - Davis, Z.J.

AU - Hansen, O.

AU - Grey, F.

PY - 1998/6

Y1 - 1998/6

M3 - Proceeding

BT - Nordic-Baltic SPM Workshop. "Laser and AFM Lithography on Aluminum- a Fabrication Tool for Nanomechanical Devices".

ER -