TY - JOUR
T1 - New technology for multi-sensor silicon needles for biomedical applications
AU - Errachid, A.
AU - Ivorra, A.
AU - Aguiló, J.
AU - Villa, R.
AU - Zine, N.
AU - Bausells, J.
PY - 2001/8/30
Y1 - 2001/8/30
N2 - A multi-sensor silicon needle including two ion-sensitive field effect transistor (ISFET) sensors, a platinum pseudo-reference electrode (Pt) and a temperature sensor has been fabricated by using a CMOS-compatible technology and silicon micromachining. This paper presents a summary of the fabrication process and results of the device characterisation. The feasibility of the fabrication technology has been demonstrated and all devices have operated satisfactorily, with a response showing good sensitivity and linearity. The multi-sensor has been developed for the detection of myocardial ischemia during cardiac surgery.
AB - A multi-sensor silicon needle including two ion-sensitive field effect transistor (ISFET) sensors, a platinum pseudo-reference electrode (Pt) and a temperature sensor has been fabricated by using a CMOS-compatible technology and silicon micromachining. This paper presents a summary of the fabrication process and results of the device characterisation. The feasibility of the fabrication technology has been demonstrated and all devices have operated satisfactorily, with a response showing good sensitivity and linearity. The multi-sensor has been developed for the detection of myocardial ischemia during cardiac surgery.
UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-0035974988&partnerID=MN8TOARS
U2 - 10.1016/S0925-4005(01)00826-7
DO - 10.1016/S0925-4005(01)00826-7
M3 - Article
SN - 0925-4005
VL - 78
SP - 279
EP - 284
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
IS - 1-3
ER -