New technology for multi-sensor silicon needles for biomedical applications

A. Errachid, A. Ivorra, J. Aguiló, R. Villa, N. Zine, J. Bausells

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    Resum

    A multi-sensor silicon needle including two ion-sensitive field effect transistor (ISFET) sensors, a platinum pseudo-reference electrode (Pt) and a temperature sensor has been fabricated by using a CMOS-compatible technology and silicon micromachining. This paper presents a summary of the fabrication process and results of the device characterisation. The feasibility of the fabrication technology has been demonstrated and all devices have operated satisfactorily, with a response showing good sensitivity and linearity. The multi-sensor has been developed for the detection of myocardial ischemia during cardiac surgery.
    Idioma originalAnglès
    Pàgines (de-a)279-284
    Nombre de pàgines6
    RevistaSensors and Actuators, B: Chemical
    Volum78
    Número1-3
    DOIs
    Estat de la publicacióPublicada - 30 d’ag. 2001

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