TY - JOUR
T1 - Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry
AU - Davis, Z. J.
AU - Abadal, G.
AU - Helbo, B.
AU - Hansen, O.
AU - Campabadal, F.
AU - Pérez-Murano, F.
AU - Esteve, J.
AU - Figueras, E.
AU - Verd, J.
AU - Barniol, N.
AU - Boisen, A.
PY - 2003/8/15
Y1 - 2003/8/15
N2 - Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of a resonating cantilever-based mass sensor, which monitors the mass change of the cantilever by measuring its resonant frequency shift. A fabrication method for nanometer-sized cantilevers with electrostatic excitation and integrated capacitive readout is introduced. The dynamic behavior of the nanometer-sized cantilever is characterized at atmospheric pressure using optical microscopy and in vacuum using scanning electron microscopy (SEM). A monolithic integration method for combining the nano-cantilevers with CMOS circuitry is described in detail. The circuitry is used to enhance the capacitive readout. The fabrication results, showing integrated nano-cantilevers with a CMOS analog amplification circuit, are presented along with preliminary electrical characterization of the device. © 2003 Elsevier Science B.V. All rights reserved.
AB - Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of a resonating cantilever-based mass sensor, which monitors the mass change of the cantilever by measuring its resonant frequency shift. A fabrication method for nanometer-sized cantilevers with electrostatic excitation and integrated capacitive readout is introduced. The dynamic behavior of the nanometer-sized cantilever is characterized at atmospheric pressure using optical microscopy and in vacuum using scanning electron microscopy (SEM). A monolithic integration method for combining the nano-cantilevers with CMOS circuitry is described in detail. The circuitry is used to enhance the capacitive readout. The fabrication results, showing integrated nano-cantilevers with a CMOS analog amplification circuit, are presented along with preliminary electrical characterization of the device. © 2003 Elsevier Science B.V. All rights reserved.
KW - CMOS circuitry
KW - Mass sensing nano-cantilevers
KW - Monolithic integration
UR - https://www.scopus.com/pages/publications/10744221068
U2 - 10.1016/S0924-4247(03)00208-5
DO - 10.1016/S0924-4247(03)00208-5
M3 - Article
SN - 0924-4247
VL - 105
SP - 311
EP - 319
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
ER -