Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range

Jaume Verd*, A. Uranga, G. Abadal, J. L. Teva, F. Torres, J. López, F. Pérez-Murano, J. Esteve, Nuria Barniol

*Autor corresponent d’aquest treball

Producció científica: Contribució a revistaArticleRecercaAvaluat per experts

125 Cites (Scopus)

Resum

This letter presents the design, fabrication, and demonstration of a CMOS/microelectromechanical system (MEMS) electrostatically self-excited resonator based on a submicrometer-scale cantilever with ∼ 1 ag/Hz mass sensitivity. The mechanical resonator is the frequency-determining element of an oscillator circuit monolithically integrated and implemented in a commercial 0.35-μm CMOS process. The oscillator is based on a Pierce topology adapted for the MEMS resonator that presents a mechanical resonance frequency of ∼ 6 MHz, a relative low quality factor of 100, and a large motional resistance of ∼25 MΩ. The MEMS oscillator has a frequency stability of ∼ 1.6 Hz resulting in a mass resolution of ∼1 ag (1 ag = 10-18 g) in air conditions.

Idioma originalAnglès
Pàgines (de-a)146-148
Nombre de pàgines3
RevistaIEEE Electron Device Letters
Volum29
Número2
DOIs
Estat de la publicacióPublicada - de febr. 2008

Fingerprint

Navegar pels temes de recerca de 'Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range'. Junts formen un fingerprint únic.

Com citar-ho