Modeling of the leakage current in ultrathin la₂O₃ films using a generalized power law equation

Keyphrases

• Leakage Current 100%
• Ultrathin 100%
• La2O3 100%
• Generalized Power 100%
• Power Law Equation 100%
• In Situ 33%
• MOS Structure 33%
• Dielectric Breakdown 33%
• Annealing 33%
• Voltage Dependence 33%
• Constant Voltage Stress 33%
• Series Resistance 33%
• Current-voltage (I-V) Characteristics 33%
• Vacuum Condition 33%
• Ultra-high Vacuum 33%
• Evaporation Technique 33%
• Oxide Layer 33%
• Voltage Ramp 33%
• Power-law Model 33%
• Parallel Resistance 33%
• Electron Beam Evaporation 33%
• Lanthanum Oxide 33%

Engineering

• Oxide Layer 100%
• Constant Voltage 100%
• Series Resistance 100%
• Parallel Resistance 100%
• Power Law Model 100%
• Electron-Beam Evaporation 100%
• Dielectrics 100%
• Current-Voltage Characteristic 100%

Material Science

• Film 100%
• Oxide Compound 100%
• Lanthanum 50%
• Electrical Breakdown 50%
• Current-Voltage Characteristic 50%