Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

J. Arcamone, G. Rius, G. Abadal, J. Teva, N. Barniol, F. Pérez-Murano

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Idioma original	Anglès
Pàgines (de-a)	1216-1220
Revista	Microelectronic Engineering
Volum	4
Número	9
Estat de la publicació	Publicada - 1 de gen. 2006

Altres arxius i enllaços

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title = "Micro/nanomechanical resonators for distributed mass sensing with capacitive detection",

author = "J. Arcamone and G. Rius and G. Abadal and J. Teva and N. Barniol and F. P{\'e}rez-Murano",

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T1 - Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

AU - Arcamone, J.

AU - Rius, G.

AU - Abadal, G.

AU - Teva, J.

AU - Barniol, N.

AU - Pérez-Murano, F.

PY - 2006/1/1

Y1 - 2006/1/1

UR - https://www.scopus.com/pages/publications/33646028806

M3 - Article

SN - 0167-9317

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JO - Microelectronic Engineering

JF - Microelectronic Engineering

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