Keyphrases
MOSFET
100%
Dielectric
100%
High-k Dielectric
100%
Conductive Atomic Force Microscopy (C-AFM)
100%
Device Simulator
50%
Grain Size
25%
Small Area
25%
Gate Dielectric
25%
Simulation Methodology
25%
Threshold Voltage
25%
Oxide Thickness
25%
Grain Boundary
25%
Nanometer Range
25%
Variability Sources
25%
Charge Density
25%
Statistical Features
25%
3D Devices
25%
Polycrystallization
25%
Boundary Depth
25%
Oxide Charge
25%
Engineering
Conductive
100%
Input Data
100%
Metal-Oxide-Semiconductor Field-Effect Transistor
100%
Atomic Force Microscope
100%
Dielectrics
100%
Polycrystalline
100%
Nanoscale
33%
Gate Dielectric
16%
Oxide Thickness
16%
Statistical Characteristic
16%
Nanometer Range
16%
Charge Density
16%
Grain Boundaries
16%
Material Science
Metal-Oxide-Semiconductor Field-Effect Transistor
100%
Dielectric Material
100%
Grain Size
14%
Density
14%
Oxide Compound
14%
Grain Boundaries
14%