MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing

M. Villarroya, J. Verd, J. Teva, G. Abadal, E. Figueras, F. Pérez-Murano, J. Esteve, N. Barniol

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Idioma original	Anglès
Pàgines (de-a)	78-85
Revista	Proceedings of SPIE, The international Society for Optical Engineering
Volum	5836
Número	9
DOIs	https://doi.org/10.1117/12.608354
Estat de la publicació	Publicada - 1 de gen. 2005

Accés al document

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title = "MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing",

author = "M. Villarroya and J. Verd and J. Teva and G. Abadal and E. Figueras and F. P{\'e}rez-Murano and J. Esteve and N. Barniol",

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T1 - MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing

AU - Villarroya, M.

AU - Verd, J.

AU - Teva, J.

AU - Abadal, G.

AU - Figueras, E.

AU - Pérez-Murano, F.

AU - Esteve, J.

AU - Barniol, N.

PY - 2005/1/1

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UR - https://www.scopus.com/pages/publications/28344449959

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DO - 10.1117/12.608354

M3 - Article

SN - 0277-786X

VL - 5836

SP - 78

EP - 85

JO - Proceedings of SPIE, The international Society for Optical Engineering

JF - Proceedings of SPIE, The international Society for Optical Engineering

IS - 9

ER -