TY - JOUR
T1 - Measurement of the vibration state of an array of micro cantilevers by diffractional methods
AU - Agustí, J.
AU - Murillo, G.
AU - Cuadrado, A.
AU - Alda, J.
AU - López-Suárez, M.
AU - Abadal, G.
PY - 2012/12/27
Y1 - 2012/12/27
N2 - The amplitude of vibration of an array of micro-cantilevers piezoelectrically excited has been measured by analyzing the diffraction pattern given by the structure. A model for the simulation of this situation, and some out-of-plane interferometric measurements based on diffraction pattern, have been developed and performed to fully understand the dynamic of the elements and the diffraction pattern produced by them. © Sociedad Española de Óptica.
AB - The amplitude of vibration of an array of micro-cantilevers piezoelectrically excited has been measured by analyzing the diffraction pattern given by the structure. A model for the simulation of this situation, and some out-of-plane interferometric measurements based on diffraction pattern, have been developed and performed to fully understand the dynamic of the elements and the diffraction pattern produced by them. © Sociedad Española de Óptica.
KW - Diffraction
KW - Micro-electro-mechanical systems
UR - https://dialnet.unirioja.es/servlet/articulo?codigo=3937997
UR - https://www.scopus.com/pages/publications/84871415533
U2 - 10.7149/OPA.45.2.105
DO - 10.7149/OPA.45.2.105
M3 - Article
SN - 0030-3917
VL - 45
SP - 105
EP - 111
JO - Optica Pura y Aplicada
JF - Optica Pura y Aplicada
IS - 2
ER -