Logistic modeling of progressive breakdown in ultrathin gate oxides

E. Miranda*, L. Bandiera, A. Cester, A. Paccagnella

*Autor corresponent d’aquest treball

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Resum

The sigmoidal behavior exhibited by the current-time characteristics of constant voltage stressed MOS capacitors with ultrathin oxides is ascribed to a self-constrained increase of the leakage sites population that assist the conduction process between the electrodes. To analytically describe this dynamical process we consider a classical model of population growth theories such as the Verhulst differential equation. The role played by the background tunneling current in the detection of the breakdown event is also discussed.

Idioma originalAnglès
Pàgines (de-a)83-86
Nombre de pàgines4
RevistaEuropean Solid-State Device Research Conference
DOIs
Estat de la publicacióPublicada - 2003

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