@inbook{d10afa6003f442b4b909ff2406b9f33c,
title = "Large-signal model of a resonating cantilever-based transducer for system level electrical simulation",
author = "J. Verd and J. Teva and G. Abadal and F. P{\'e}rez-Murano and J. Esteve and N. Barniol",
year = "2005",
month = may,
day = "1",
language = "English",
isbn = "978-0-8194-5831-5",
series = "Proceedings of SPIE; 5836",
pages = "98--106",
booktitle = "SPIE International Symposium on Microtechnologies for The New Millenium",
edition = "1",
}