L-band Lithium Niobate-On-Insulator SH0 Resonators Avoiding Transverse Spurious Modes through Electrode Apodization

Lluis Acosta, Eloi Guerrero, Carlos Caballero, Jordi Verdu, Albert Guerrero, Xavier Borrise, Jaume Esteve, Pedro De Paco

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Resum

This work discusses how apodization of the interdigital transducers (IDT) of shear horizontal (SH0) acoustic wave resonators allows to avoid the presence of spurious modes between resonances and enhance the achieved electromechanical coupling and quality factor. Achieving spurious-free resonators is fundamental to face the design of ladder filters with flat passbands. The proposal is demonstrated with manufactured resonators on a 30°YX-cut lithium niobate-on-insulator (LNOI) structure comparing the performance of apodized and non-apodized devices. Clean resonators without transverse spurious modes have been obtained showing an improvement in quality factor and electromechanical coupling coefficient, attaining k_t2=17 %, Q_max ∼ 800 and impedance ratios of 69 dB.

Idioma originalEnglish
EditorInstitute of Electrical and Electronics Engineers Inc.
Nombre de pàgines4
ISBN (electrònic)9782874870729
DOIs
Estat de la publicacióPublicada - 2023

Sèrie de publicacions

Nom2023 53rd European Microwave Conference, EuMC 2023

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