Interplay of Voltage and Temperature Acceleration of Oxide Breakdown for Ultra-Thin Oxides

E. Wu, J. Suñé, W. Lai, E. Nowak, J. McKenna, A. Vayshenker, D. Harmon

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@article{e56c73bfc6da4b17bf2ec5ecab842bed,

title = "Interplay of Voltage and Temperature Acceleration of Oxide Breakdown for Ultra-Thin Oxides",

author = "E. Wu and J. Su{\~n}{\'e} and W. Lai and E. Nowak and J. McKenna and A. Vayshenker and D. Harmon",

year = "2002",

month = jan,

day = "1",

doi = "10.1016/S0038-1101(02)00151-X",

language = "English",

volume = "46",

pages = "1787--1798",

journal = "Solid-state electronics",

issn = "0038-1101",

publisher = "Elsevier Limited",

number = "11",

}

TY - JOUR

T1 - Interplay of Voltage and Temperature Acceleration of Oxide Breakdown for Ultra-Thin Oxides

AU - Wu, E.

AU - Suñé, J.

AU - Lai, W.

AU - Nowak, E.

AU - McKenna, J.

AU - Vayshenker, A.

AU - Harmon, D.

PY - 2002/1/1

Y1 - 2002/1/1

U2 - 10.1016/S0038-1101(02)00151-X

DO - 10.1016/S0038-1101(02)00151-X

M3 - Article

SN - 0038-1101

VL - 46

SP - 1787

EP - 1798

JO - Solid-state electronics

JF - Solid-state electronics

IS - 11

ER -