Integrated CMOS-MEMS with on chip read-out electronics for high frequency applications

J. Verd; A. Uranga; J. Teva; J.L. López; F. Torres; J. Esteve; G. Abadal; Nuria Barniol Beumala; Francesc Pérez Murano

Integrated CMOS-MEMS with on chip read-out electronics for high frequency applications

J. Verd, A. Uranga, J. Teva, J.L. López, F. Torres, J. Esteve, G. Abadal, Nuria Barniol Beumala, Francesc Pérez Murano

Producció científica: Contribució a revista › Article › Recerca

Idioma original	Anglès
Pàgines (de-a)	495-497
Revista	IEEE Electron Device Letters
Volum	6
Estat de la publicació	Publicada - 1 de gen. 2006

Com citar-ho

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title = "Integrated CMOS-MEMS with on chip read-out electronics for high frequency applications",

author = "J. Verd and A. Uranga and J. Teva and J.L. L{\'o}pez and F. Torres and J. Esteve and G. Abadal and {Barniol Beumala}, Nuria and {P{\'e}rez Murano}, Francesc",

year = "2006",

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journal = "IEEE Electron Device Letters",

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AU - Verd, J.

AU - Uranga, A.

AU - Teva, J.

AU - López, J.L.

AU - Torres, F.

AU - Esteve, J.

AU - Abadal, G.

AU - Barniol Beumala, Nuria

AU - Pérez Murano, Francesc

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VL - 6

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JO - IEEE Electron Device Letters

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