Resum
© 2016 Author(s). The integration of epitaxial BaTiO 3 films on silicon, combining c-orientation, surface flatness, and high ferroelectric polarization is of main interest towards its use in memory devices. This combination of properties has been only achieved so far by using yttria-stabilized zirconia buffer layers. Here, the all-perovskite BaTiO 3 /LaNiO 3 /SrTiO 3 heterostructure is grown monolithically on Si(001). The BaTiO 3 films are epitaxial and c-oriented and present low surface roughness and high remnant ferroelectric polarization around 6 μC/cm 2 . This result paves the way towards the fabrication of lead-free BaTiO 3 ferroelectric memories on silicon platforms.
Idioma original | Anglès |
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Número d’article | 122903 |
Revista | Applied Physics Letters |
Volum | 109 |
Número | 12 |
DOIs | |
Estat de la publicació | Publicada - 19 de set. 2016 |