Gate stack insulator breakdown when the interface layer thickness is scaled toward zero

Keyphrases

• Insulator 100%
• Gate Stack 100%
• Equivalent Oxide Thickness 100%
• Interfacial Thickness 100%
• Interface Layer Thickness 100%
• Dielectric Breakdown 50%
• Oxides 50%
• Silicon Oxide 50%
• Percolation Model 50%
• Metal Oxide Semiconductor 50%
• High-k Material 50%
• Gate Insulator 50%
• Insulator Stack 50%

Engineering

• Layer Thickness 100%
• Gate Stack 100%
• Interface Layer 100%
• Interfacial Layer 50%
• Oxide Thickness 50%
• Dielectrics 25%
• Silicon Oxide 25%
• Metal Oxide Semiconductor 25%

Material Science

• Oxide Compound 100%
• Interface Layer Thickness 100%
• Oxide Semiconductor 25%
• Metal Oxide 25%
• Electrical Breakdown 25%
• Silicon 25%
• Percolation 25%