Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator

A. Uranga*, J. Verd, J. L. López, J. Teva, G. Abadal, F. Torres, J. Esteve, F. Pérez-Murano, N. Barniol

*Autor corresponent d’aquest treball

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24 Cites (Scopus)

Resum

The design and test of a fully integrated CMOS-MEMS-MIXLER, using a commercial technology (AMS 0.35 μm) is presented. The MEMS structure is basically a clamped-clamped beam resonator implemented with the polysilicon capacitance module of the selected technology, showing a fundamental lateral resonance frequency of 22.5 MHz. Two different approaches based, respectively, on the nonlinearity of the voltage against the excitation force and on the amplitude modulation of the excitation signal, have been proposed in order to operate the MEMS as a MIXLER.

Idioma originalAnglès
Pàgines (de-a)452-453
Nombre de pàgines2
RevistaElectronics Letters
Volum43
Número8
DOIs
Estat de la publicacióPublicada - 2007

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