Fabrication and characterization of nanoresonating devices for mass detection

Z. J. Davis; G. Abadal; O. Kuhn; O. Hansen; F. Grey; A. Boisen

doi:10.1116/1.591247

Fabrication and characterization of nanoresonating devices for mass detection

Z. J. Davis, G. Abadal, O. Kuhn, O. Hansen, F. Grey, A. Boisen

Producció científica: Contribució a revista › Article › Recerca › Avaluat per experts

120 Cites (Scopus)

Resum

A simple and flexible method for the fabrication of nanomechanical resonators is described. Direct laser writing on Al coated layered substrates yields a highly flexible mask definition technique and allows to realize nanometer-scale suspended cantilevers. The preliminary characterization results based on direct observation of the cantilever resonance are presented.

Idioma original	Anglès
Pàgines (de-a)	612-616
Revista	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volum	18
DOIs	https://doi.org/10.1116/1.591247
Estat de la publicació	Publicada - 1 de març 2000

Accés al document

10.1116/1.591247

Altres arxius i enllaços

https://www.scopus.com/pages/publications/0034156464

Com citar-ho

@article{69b0cff26a734cb883a79a05496bb8cc,

title = "Fabrication and characterization of nanoresonating devices for mass detection",

abstract = "A simple and flexible method for the fabrication of nanomechanical resonators is described. Direct laser writing on Al coated layered substrates yields a highly flexible mask definition technique and allows to realize nanometer-scale suspended cantilevers. The preliminary characterization results based on direct observation of the cantilever resonance are presented.",

author = "Davis, \{Z. J.\} and G. Abadal and O. Kuhn and O. Hansen and F. Grey and A. Boisen",

year = "2000",

month = mar,

day = "1",

doi = "10.1116/1.591247",

language = "English",

volume = "18",

pages = "612--616",

}

TY - JOUR

T1 - Fabrication and characterization of nanoresonating devices for mass detection

AU - Davis, Z. J.

AU - Abadal, G.

AU - Kuhn, O.

AU - Hansen, O.

AU - Grey, F.

AU - Boisen, A.

PY - 2000/3/1

Y1 - 2000/3/1

N2 - A simple and flexible method for the fabrication of nanomechanical resonators is described. Direct laser writing on Al coated layered substrates yields a highly flexible mask definition technique and allows to realize nanometer-scale suspended cantilevers. The preliminary characterization results based on direct observation of the cantilever resonance are presented.

AB - A simple and flexible method for the fabrication of nanomechanical resonators is described. Direct laser writing on Al coated layered substrates yields a highly flexible mask definition technique and allows to realize nanometer-scale suspended cantilevers. The preliminary characterization results based on direct observation of the cantilever resonance are presented.

UR - https://www.scopus.com/pages/publications/0034156464

U2 - 10.1116/1.591247

DO - 10.1116/1.591247

M3 - Article

SN - 1071-1023

VL - 18

SP - 612

EP - 616

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ER -

Fabrication and characterization of nanoresonating devices for mass detection

Resum

Accés al document

Altres arxius i enllaços

Fingerprint

Com citar-ho