Electrostatically controlled multi-purpose torsional structures obtained on monocrystalline silicon

Ch Burrer, O. Ruiz, J. Samitier, S. Marco, J. R. Morante, J. Esteve

Producció científica: Contribució a revista › Article › Recerca

Idioma original	Anglès
Pàgines (de-a)	103-104
Revista	Journal of Micromechanics and Microengineering
Volum	6
Número	1
Estat de la publicació	Publicada - 1 de gen. 1996

Altres arxius i enllaços

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title = "Electrostatically controlled multi-purpose torsional structures obtained on monocrystalline silicon",

author = "Ch Burrer and O. Ruiz and J. Samitier and S. Marco and Morante, \{J. R.\} and J. Esteve",

year = "1996",

month = jan,

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language = "English",

volume = "6",

pages = "103--104",

number = "1",

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TY - JOUR

T1 - Electrostatically controlled multi-purpose torsional structures obtained on monocrystalline silicon

AU - Burrer, Ch

AU - Ruiz, O.

AU - Samitier, J.

AU - Marco, S.

AU - Morante, J. R.

AU - Esteve, J.

PY - 1996/1/1

Y1 - 1996/1/1

UR - https://www.scopus.com/pages/publications/0030091389

M3 - Article

SN - 0960-1317

VL - 6

SP - 103

EP - 104

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 1

ER -