Electrochemical Etching of Porous Silicon Sacrificial Layers for Micromachining Applications

M. Navarro, J.M. López-Villegas, J. Samitier, J.R. Morante, J. Bausells, A. Merlos

Producció científica: Contribució a revista › Article › Recerca

Idioma original	Anglès
Pàgines (de-a)	131-132
Revista	Journal of Micromechanics and Microengineering
Volum	7
Número	3
Estat de la publicació	Publicada - 1 de set. 1997

Com citar-ho

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title = "Electrochemical Etching of Porous Silicon Sacrificial Layers for Micromachining Applications",

author = "M. Navarro and J.M. L{\'o}pez-Villegas and J. Samitier and J.R. Morante and J. Bausells and A. Merlos",

year = "1997",

month = sep,

day = "1",

language = "English",

volume = "7",

pages = "131--132",

number = "3",

}

TY - JOUR

T1 - Electrochemical Etching of Porous Silicon Sacrificial Layers for Micromachining Applications

AU - Navarro, M.

AU - López-Villegas, J.M.

AU - Samitier, J.

AU - Morante, J.R.

AU - Bausells, J.

AU - Merlos, A.

PY - 1997/9/1

Y1 - 1997/9/1

M3 - Article

SN - 0960-1317

VL - 7

SP - 131

EP - 132

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 3

ER -